Latest about EUV
Zeiss expands German site that caps ASML's EUV scanner output
Zeiss Semiconductor Manufacturing Technology is adding around 25,000 square meters of production and production-adjacent space at Oberkochen in southern Germany.
ASML's planned Low-NA EUV machine price hikes reportedly anger TSMC
Premium Low-NA, high stakes
ASML looks to increase prices of its Low-NA EUV tools beyond existing productivity-based model — company wants to capture the value of all the advantages its tools offer, not just wafer throughput improvements
ASML's comments point to intentions to increase prices, though the company is expected to maintain its value-based approach to price setting. Yet, TSMC is reportedly unhappy about the potential plan.
Intel expands production of photomasks in California: EUV and High-NA EUV in the focal point
Intel begins expansion of its Bowers Campus in Santa Clara to produce more photomasks in-house, which is set to be crucial as process technologies get more sophisticated.
ASML denies US government report that its EUV chipmaking tool was shipped to China
U.S. Commerce Secretary Lutnick expresses concerns in a conversation with ASML executives that China has an EUV lithography system as ASML denies shipping such scanners to the PRC.
Japanese chemical giant JSR expands to Taiwan for EUV photoresist production near TSMC
Premium The plant, located in Yunlin County, is expected to come online as early as 2028 and will co-develop advanced photoresists with TSMC.
ASML's roadmap for chipmaking lithography tools examined — from DUV to Low-NA, High-NA, Hyper-NA, and beyond
Premium ASML shipped 48 EUV lithography systems and 131 immersion DUV tools in 2025, generating €32.7 billion in total revenue and ending the year with a €38.8 billion order backlog.
SK hynix places record $8 billion order for ASML EUV lithography machines
SK hynix disclosed in a regulatory filing on Tuesday that it will purchase 11.9 trillion won ($7.9 billion) worth of EUV lithography equipment from ASML.
